Electron cyclotron resonance plasma reactor for cryogenic etching

1993 ◽  
Vol 64 (12) ◽  
pp. 3572-3584 ◽  
Author(s):  
Eray S. Aydil ◽  
Jeffrey A. Gregus ◽  
Richard A. Gottscho
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor

1990 ◽  
Vol 57 (12) ◽  
pp. 1188-1190 ◽  
Author(s):  
Dennis J. Trevor ◽  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Jacques Derouard ◽  
Richard A. Gottscho ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Spatially Resolved ◽  
Field Electron ◽  
Ion Velocity ◽  
Resonance Plasma

Electron cyclotron resonance plasma reactor for production of carbon stripper foil

2017 ◽  
Vol 57 (1S) ◽  
pp. 01AA04
Author(s):  
Camille Faith Romero ◽  
Keita Kanamori ◽  
Michikazu Kinsho ◽  
Masahiro Yoshimoto ◽  
Motoi Wada
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Stripper Foil ◽  
Resonance Plasma
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