Ion energy distribution in triode ion plating

Vacuum ◽  
1984 ◽  
Vol 34 (8-9) ◽  
pp. 765-769 ◽  
Author(s):  
P Saulnier ◽  
A Debhi ◽  
J Machet
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Ion Plating

Ion energy distribution in ion plating

Vacuum ◽  
1983 ◽  
Vol 33 (5) ◽  
pp. 279-284 ◽  
Author(s):  
J. Machet ◽  
P. Saulnier ◽  
J. Ezquerra ◽  
J. Guille
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Ion Plating

The ion energy distribution in front of a negative wall

1992 ◽  
Vol 25 (4) ◽  
pp. 620-633 ◽  
Author(s):  
K -U Reimann ◽  
U Ehlemann ◽  
K Wiesemann
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

2014 ◽  
Vol 42 (7) ◽  
pp. 1880-1893 ◽  
Author(s):  
David J. Coumou ◽  
David Hamilton Clark ◽  
Theresa Kummerer ◽  
Michael Hopkins ◽  
Donal Sullivan ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution
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