Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
2008 ◽
Vol 47
(8)
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pp. 6900-6902
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2019 ◽
Vol 37
(2)
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pp. 021301
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1998 ◽
Vol 16
(6)
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pp. 3389-3395
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1999 ◽
Vol 17
(5)
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pp. 2061
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Keyword(s):
Keyword(s):