The chemical sputtering of silica by Ar+ ions and XeF2
Keyword(s):
2007 ◽
Vol 258
(1)
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pp. 264-269
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2008 ◽
Vol 10
(5)
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pp. 053037
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1996 ◽
Vol 5
(10)
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pp. 1152-1158
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1982 ◽
Vol 111-112
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pp. 744-749
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2007 ◽
pp. 329-400
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Keyword(s):
2006 ◽
Vol 8
(6)
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pp. 633-638
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Keyword(s):
1983 ◽
pp. 91-146
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Keyword(s):
1983 ◽
Vol 1
(3)
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pp. 1425-1429
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