Post-deposition annealing of sputtered zinc-oxide thin films

1984 ◽  
Vol 2 (3) ◽  
pp. 237-241 ◽  
Author(s):  
M. Bertolotti ◽  
A. Ferrari ◽  
D. Seite ◽  
A. Jaskow ◽  
A. Palma ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition

Influence of post-deposition annealing on the electrical properties of zinc oxide thin films

2014 ◽  
Vol 573 ◽  
pp. 22-26 ◽  
Author(s):  
Hui Kyung Park ◽  
Jaeseung Jo ◽  
Hee Kyeung Hong ◽  
Jaeyeong Heo
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition

scholarly journals The effect of post-deposition annealing conditions on structural and thermoelectric properties of sputtered copper oxide films

RSC Advances ◽  
2020 ◽  
Vol 10 (49) ◽  
pp. 29394-29401
Author(s):  
Chandrasekaran Abinaya ◽  
Kevin Bethke ◽  
Virgil Andrei ◽  
Jonas Baumann ◽  
Beatrix Pollakowski-Herrmann ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Thermoelectric Properties ◽  
Oxide Films ◽  
Thermoelectric Performance ◽  
Annealing Atmosphere ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Annealing Conditions ◽  
Post Deposition

This study reveals the interplay between the composition and thermoelectric performance of mixed copper oxide thin films, which can be finely adjusted by varying the annealing atmosphere.

Changes in electrical and structural properties of indium oxide thin films through post-deposition annealing

2011 ◽  
Vol 520 (1) ◽  
pp. 110-116 ◽  
Author(s):  
Kazuhiro Kato ◽  
Hideo Omoto ◽  
Takao Tomioka ◽  
Atsushi Takamatsu
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Indium Oxide ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition

scholarly journals Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

2018 ◽  
Vol 9 ◽  
pp. 17-27 ◽  
Author(s):  
Miika Mattinen ◽  
Peter J. King ◽  
Leonid Khriachtchev ◽  
Mikko J. Heikkilä ◽  
Ben Fleming ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Molybdenum Oxide ◽  
Atomic Layer ◽  
Phase Control ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Layer Deposition ◽  
Post Deposition
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