Experimental study on proximity effects in high voltage e-beam lithography

1990 ◽  
Vol 11 (1-4) ◽  
pp. 351-354 ◽  
Author(s):  
E. Boere ◽  
E. van der Drift ◽  
J. Romijn ◽  
B. Rousseeuw
Author(s):  
Yingxia Wei ◽  
Yaoxiang Liu ◽  
Tie-Jun Wang ◽  
Na Chen ◽  
Jingjing Ju ◽  
...  

We report on a systematic experimental study on the fluorescence spectra produced from a femtosecond laser filament in air under a high electric field. The electric field alone was strong enough to create corona discharge (CD). Fluorescence spectra from neutral and ionic air molecules were measured and compared with pure high-voltage CD and pure laser filamentation (FIL). Among them, high electric field assisted laser FIL produced nitrogen fluorescence more efficiently than either pure CD or pure FIL processes. The nonlinear enhancement of fluorescence from the interaction of the laser filament and corona discharging electric field resulted in a more efficient ionization along the laser filament zone, which was confirmed by the spectroscopic measurement of both ionization-induced fluorescence and plasma-scattered 800 nm laser pulses. This is believed to be the key precursor process for filament-guided discharge.


Sensors ◽  
2020 ◽  
Vol 20 (2) ◽  
pp. 411 ◽  
Author(s):  
Jordi-Roger Riba ◽  
Álvaro Gómez-Pau ◽  
Manuel Moreno-Eguilaz

Visual corona tests have been broadly applied for identifying the critical corona points of diverse high-voltage devices, although other approaches based on partial discharge or radio interference voltage measurements are also widely applied to detect corona activity. Nevertheless, these two techniques must be applied in screened laboratories, which are scarce and expensive, require sophisticated instrumentation, and typically do not allow location of the discharge points. This paper describes the detection of the visual corona and location of the critical corona points of a sphere-plane gap configurations under different pressure conditions ranging from 100 to 20 kPa, covering the pressures typically found in aeronautic environments. The corona detection is made with a low-cost CMOS imaging sensor from both the visible and ultraviolet (UV) spectrum, which allows detection of the discharge points and their locations, thus significantly reducing the complexity and costs of the instrumentation required while preserving the sensitivity and accuracy of the measurements. The approach proposed in this paper can be applied in aerospace applications to prevent the arc tracking phenomenon, which can lead to catastrophic consequences since there is not a clear protection solution, due to the low levels of leakage current involved in the pre-arc phenomenon.


2018 ◽  
Vol 20 (40) ◽  
pp. 25701-25715 ◽  
Author(s):  
Anand Narayanan Kirshnamoorthy ◽  
Kristina Oldiges ◽  
Martin Winter ◽  
Andreas Heuer ◽  
Isidora Cekic-Laskovic ◽  
...  

Combined atomistic molecular dynamics, quantum chemical, and experimental study regarding the properties of two lithium conducting salts in high voltage electrolyte solvent adiponitrile.


Vacuum ◽  
2019 ◽  
Vol 169 ◽  
pp. 108940 ◽  
Author(s):  
Jian Lu ◽  
Shengzhi Hao ◽  
Jun Chen ◽  
Limin Zhao ◽  
Fangting Hu

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