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Submicron CoSi2 structures fabricated by focused ion beam implantation and local flash lamp melting
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/0168-583x(95)01250-8
◽
1996
◽
Vol 112
(1-4)
◽
pp. 201-205
◽
Cited By ~ 13
Author(s):
L. Bischoff
◽
K.-H. Heinig
◽
J. Teichert
◽
W. Skorupa
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Flash Lamp
◽
Ion Beam Implantation
Download Full-text
Related Documents
Cited By
References
Submicron CoSi2 structures fabricated by focused ion beam implantation and local flash lamp melting
Ion Beam Processing of Materials and Deposition Processes of Protective Coatings
◽
10.1016/b978-0-444-82410-3.50047-3
◽
1996
◽
pp. 201-205
Author(s):
L. Bischoff
◽
K.-H. Heinig
◽
J. Teichert
◽
W. Skorupa
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Flash Lamp
◽
Ion Beam Implantation
Download Full-text
Conductance Oscillations in Hopping Conduction Systems Fabricated by Focused Ion Beam Implantation
Japanese Journal of Applied Physics
◽
10.1143/jjap.36.4046
◽
1997
◽
Vol 36
(Part 1, No. 6B)
◽
pp. 4046-4048
◽
Cited By ~ 1
Author(s):
Hiroki Kondo
◽
Hirotaka Iwano
◽
Osamu Nakatsuka
◽
Kazutaka Kaga
◽
Shigeaki Zaima
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Hopping Conduction
◽
Ion Beam Implantation
Download Full-text
Coulomb blockade phenomena in low-dimensional Si MOSFETs fabricated using focused-ion beam implantation
Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference
◽
10.1109/imnc.1999.797509
◽
2003
◽
Author(s):
H. Kondo
◽
S. Baba
◽
K. Izumikawa
◽
M. Sakurai
◽
S. Zaima
◽
...
Keyword(s):
Coulomb Blockade
◽
Focused Ion Beam
◽
Ion Beam
◽
Ion Beam Implantation
◽
Low Dimensional
Download Full-text
Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation
Nanotechnology
◽
10.1088/0957-4484/25/13/135302
◽
2014
◽
Vol 25
(13)
◽
pp. 135302
◽
Cited By ~ 24
Author(s):
J Llobet
◽
M Sansa
◽
M Gerbolés
◽
N Mestres
◽
J Arbiol
◽
...
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Silicon Nanowire
◽
Mechanical Resonators
◽
Electromechanical Transduction
◽
Ion Beam Implantation
Download Full-text
Focused-ion-beam Implantation of Luminescence Centers in Gallium Nitride in Optical Telecom Frequency Band
10.1109/cleo/europe-eqec52157.2021.9542578
◽
2021
◽
Author(s):
Jin-Kyu So
◽
Cesare Soci
◽
Weibo Gao
◽
Nikolay I. Zheludev
Keyword(s):
Gallium Nitride
◽
Frequency Band
◽
Focused Ion Beam
◽
Ion Beam
◽
Luminescence Centers
◽
Ion Beam Implantation
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The Doping of Si p‐Field‐Effect Transistor Devices by Gallium Focused Ion Beam Implantation Enabling Flexible Fabrication Routes at Moderate Temperatures
physica status solidi (a)
◽
10.1002/pssa.202000511
◽
2020
◽
pp. 2000511
Author(s):
Felix Winkler
◽
Carsten Strobel
◽
Christian Wenzel
◽
Johann W. Bartha
Keyword(s):
Field Effect
◽
Field Effect Transistor
◽
Focused Ion Beam
◽
Ion Beam
◽
Ion Beam Implantation
◽
Effect Transistor
◽
Flexible Fabrication
Download Full-text
One- and Zero-Dimensional Tunneling Diodes Fabricated by Focused Ion Beam Implantation
Science and Technology of Mesoscopic Structures
◽
10.1007/978-4-431-66922-7_25
◽
1992
◽
pp. 243-257
◽
Cited By ~ 2
Author(s):
Seigo Tarucha
◽
Yoshiro Hirayama
◽
Tadashi Saku
◽
Yasuhiro Tokura
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Tunneling Diodes
◽
Ion Beam Implantation
Download Full-text
Enhanced collimation in narrow channels fabricated by focused‐ion‐beam implantation
Journal of Applied Physics
◽
10.1063/1.356245
◽
1994
◽
Vol 75
(5)
◽
pp. 2477-2480
◽
Cited By ~ 2
Author(s):
T. Bever
◽
Y. Hirayama
◽
S. Tarucha
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Narrow Channels
◽
Ion Beam Implantation
Download Full-text
Investigations of the Ga[sup +] focused-ion-beam implantation in resist films for nanometer lithography applications
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.1813451
◽
2004
◽
Vol 22
(6)
◽
pp. 3016
◽
Cited By ~ 2
Author(s):
Khalil Arshak
◽
Miroslav Mihov
◽
Shohei Nakahara
◽
Arous Arshak
◽
Declan McDonagh
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
Ion Beam Implantation
Download Full-text
One‐dimensional GaAs wires fabricated by focused ion beam implantation
Applied Physics Letters
◽
10.1063/1.98574
◽
1987
◽
Vol 51
(20)
◽
pp. 1620-1622
◽
Cited By ~ 48
Author(s):
Toshiro Hiramoto
◽
Kazuhiko Hirakawa
◽
Yasuhiro Iye
◽
Toshiaki Ikoma
Keyword(s):
Focused Ion Beam
◽
Ion Beam
◽
One Dimensional
◽
Ion Beam Implantation
Download Full-text
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