Focused-ion-beam Implantation of Luminescence Centers in Gallium Nitride in Optical Telecom Frequency Band

Mapping Intimacies ◽

10.1109/cleo/europe-eqec52157.2021.9542578 ◽

2021 ◽

Author(s):

Jin-Kyu So ◽

Cesare Soci ◽

Weibo Gao ◽

Nikolay I. Zheludev

Keyword(s):

Gallium Nitride ◽

Frequency Band ◽

Focused Ion Beam ◽

Ion Beam ◽

Luminescence Centers ◽

Ion Beam Implantation

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Conductance Oscillations in Hopping Conduction Systems Fabricated by Focused Ion Beam Implantation

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.4046 ◽

1997 ◽

Vol 36 (Part 1, No. 6B) ◽

pp. 4046-4048 ◽

Author(s):

Hiroki Kondo ◽

Hirotaka Iwano ◽

Osamu Nakatsuka ◽

Kazutaka Kaga ◽

Shigeaki Zaima ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Hopping Conduction ◽

Ion Beam Implantation

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Coulomb blockade phenomena in low-dimensional Si MOSFETs fabricated using focused-ion beam implantation

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.1999.797509 ◽

2003 ◽

Author(s):

H. Kondo ◽

S. Baba ◽

K. Izumikawa ◽

M. Sakurai ◽

S. Zaima ◽

...

Keyword(s):

Coulomb Blockade ◽

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Implantation ◽

Low Dimensional

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Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Nanotechnology ◽

10.1088/0957-4484/25/13/135302 ◽

2014 ◽

Vol 25 (13) ◽

pp. 135302 ◽

Author(s):

J Llobet ◽

M Sansa ◽

M Gerbolés ◽

N Mestres ◽

J Arbiol ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Silicon Nanowire ◽

Mechanical Resonators ◽

Electromechanical Transduction ◽

Ion Beam Implantation

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Submicron CoSi2 structures fabricated by focused ion beam implantation and local flash lamp melting

Ion Beam Processing of Materials and Deposition Processes of Protective Coatings ◽

10.1016/b978-0-444-82410-3.50047-3 ◽

1996 ◽

pp. 201-205

Author(s):

L. Bischoff ◽

K.-H. Heinig ◽

J. Teichert ◽

W. Skorupa

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Implantation

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The Doping of Si p‐Field‐Effect Transistor Devices by Gallium Focused Ion Beam Implantation Enabling Flexible Fabrication Routes at Moderate Temperatures

physica status solidi (a) ◽

10.1002/pssa.202000511 ◽

2020 ◽

pp. 2000511

Author(s):

Felix Winkler ◽

Carsten Strobel ◽

Christian Wenzel ◽

Johann W. Bartha

Keyword(s):

Field Effect ◽

Field Effect Transistor ◽

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Implantation ◽

Effect Transistor ◽

Flexible Fabrication

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One- and Zero-Dimensional Tunneling Diodes Fabricated by Focused Ion Beam Implantation

Science and Technology of Mesoscopic Structures ◽

10.1007/978-4-431-66922-7_25 ◽

1992 ◽

pp. 243-257 ◽

Author(s):

Seigo Tarucha ◽

Yoshiro Hirayama ◽

Tadashi Saku ◽

Yasuhiro Tokura

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Tunneling Diodes ◽

Ion Beam Implantation

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Enhanced collimation in narrow channels fabricated by focused‐ion‐beam implantation

Journal of Applied Physics ◽

10.1063/1.356245 ◽

1994 ◽

Vol 75 (5) ◽

pp. 2477-2480 ◽

Author(s):

T. Bever ◽

Y. Hirayama ◽

S. Tarucha

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Narrow Channels ◽

Ion Beam Implantation

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Investigations of the Ga[sup +] focused-ion-beam implantation in resist films for nanometer lithography applications

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1813451 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3016 ◽

Author(s):

Khalil Arshak ◽

Miroslav Mihov ◽

Shohei Nakahara ◽

Arous Arshak ◽

Declan McDonagh

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Implantation

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One‐dimensional GaAs wires fabricated by focused ion beam implantation

Applied Physics Letters ◽

10.1063/1.98574 ◽

1987 ◽

Vol 51 (20) ◽

pp. 1620-1622 ◽

Author(s):

Toshiro Hiramoto ◽

Kazuhiko Hirakawa ◽

Yasuhiro Iye ◽

Toshiaki Ikoma

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

One Dimensional ◽

Ion Beam Implantation

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Submicron CoSi2 structures fabricated by focused ion beam implantation and local flash lamp melting

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(95)01250-8 ◽

1996 ◽

Vol 112 (1-4) ◽

pp. 201-205 ◽

Author(s):

L. Bischoff ◽

K.-H. Heinig ◽

J. Teichert ◽

W. Skorupa

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Ion Beam Implantation

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