Kinetics of the reactions of intrinsic and phosphorus doped polycrystalline silicon with molecular chlorine

1991 ◽  
Vol 153 (3) ◽  
pp. 483-489 ◽  
Author(s):  
Zane H. Walker ◽  
Elmer A. Ogryzlo
Keyword(s):  
Polycrystalline Silicon ◽  
Molecular Chlorine ◽  
Phosphorus Doped ◽  
Kinetics Of

The Oxidation Kinetics of Thin Polycrystalline Silicon Films

1991 ◽  
Vol 138 (1) ◽  
pp. 214-219 ◽  
Author(s):  
Yangyuan Wang ◽  
Jiang Tao ◽  
Shen Tong ◽  
Tiejun Sun ◽  
Aizhen Zhang ◽  
...  
Keyword(s):  
Oxidation Kinetics ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films ◽  
Kinetics Of

Contrast enhancement pattern transfer etching of phosphorus‐doped polycrystalline silicon

1987 ◽  
Vol 51 (17) ◽  
pp. 1328-1330 ◽  
Author(s):  
N. Hayasaka ◽  
H. Nakahara ◽  
H. Okano ◽  
Y. Horiike
Keyword(s):  
Contrast Enhancement ◽  
Polycrystalline Silicon ◽  
Pattern Transfer ◽  
Enhancement Pattern ◽  
Phosphorus Doped

Boron- and phosphorus-doped polycrystalline silicon thin films prepared by silver-induced layer exchange

2013 ◽  
Vol 102 (21) ◽  
pp. 212102 ◽  
Author(s):  
T. Antesberger ◽  
T. A. Wassner ◽  
C. Jaeger ◽  
M. Algasinger ◽  
M. Kashani ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Phosphorus Doped

Kinetics of the chlorination of azobenzene and comparison with azoxybenzene

1984 ◽  
Vol 37 (11) ◽  
pp. 2249
Author(s):  
KA Ahmed ◽  
PJ Hanhela ◽  
M Hassan ◽  
J Miller ◽  
DB Paul
Keyword(s):  
Nucleophilic Substitution ◽  
Kinetic Data ◽  
Electrophilic Substitution ◽  
Relative Rate ◽  
Molecular Chlorine ◽  
Partial Rate ◽  
Reaction Proceeds ◽  
Kinetics Of ◽  
No Activation

The activating effect of the phenylazo substituent in electrophilic substitution has been examined. The rates and partial rate factors for chlorination of azobenzene with molecular chlorine and protonated chlorine acetate have been determined relative to benzene. Whereas the chlorine acetate reaction proceeds readily (relative rate 4900) there is virtually no activation to chlorination by molecular chlorine. Complexes between azobenzene and bromine were, however, isolated and chatacterized. Their formation implies that during molecular halogenation reactions the electrophile is essentially unavailable. The relative chlorination rates for azobenzene and azoxybenzene have also been established: the phenylazo group is more activating towards protonated chlorine acetate whereas azoxybenzene (which does not complex with halogens) is the more reactive with molecular chlorine. The chlorination results confirm the versatility of the phenylazo group which is the first substituent for which kinetic data have been obtained quantifying activation of aromatic electrophilic, radical and nucleophilic substitution.

Optical properties of phosphorus‐doped polycrystalline silicon layers

1981 ◽  
Vol 52 (11) ◽  
pp. 6870-6878 ◽  
Author(s):  
G. Lubberts ◽  
B. C. Burkey ◽  
F. Moser ◽  
E. A. Trabka
Keyword(s):  
Optical Properties ◽  
Polycrystalline Silicon ◽  
Phosphorus Doped
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