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Optical properties of phosphorus‐doped polycrystalline silicon layers
Journal of Applied Physics
◽
10.1063/1.328681
◽
1981
◽
Vol 52
(11)
◽
pp. 6870-6878
◽
Cited By ~ 71
Author(s):
G. Lubberts
◽
B. C. Burkey
◽
F. Moser
◽
E. A. Trabka
Keyword(s):
Optical Properties
◽
Polycrystalline Silicon
◽
Phosphorus Doped
Download Full-text
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References
Morphological instability and Si diffusion in nanoscale cobalt silicide films formed on heavily phosphorus doped polycrystalline silicon
Applied Physics Letters
◽
10.1063/1.110804
◽
1993
◽
Vol 63
(14)
◽
pp. 1933-1935
◽
Cited By ~ 13
Author(s):
S. Pramanick
◽
Yu. N. Erokhin
◽
B. K. Patnaik
◽
G. A. Rozgonyi
Keyword(s):
Polycrystalline Silicon
◽
Cobalt Silicide
◽
Morphological Instability
◽
Phosphorus Doped
Download Full-text
Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films
Acta Physica Sinica
◽
10.7498/aps.55.2523
◽
2006
◽
Vol 55
(5)
◽
pp. 2523
Author(s):
Huang Rui
◽
Lin Xuan-Ying
◽
Yu Yun-Peng
◽
Lin Kui-Xun
◽
Zhu Zu-Song
◽
...
Keyword(s):
Optical Properties
◽
Polycrystalline Silicon
◽
Silicon Films
◽
Hydrogen Dilution
◽
Polycrystalline Silicon Films
Download Full-text
Contrast enhancement pattern transfer etching of phosphorus‐doped polycrystalline silicon
Applied Physics Letters
◽
10.1063/1.98668
◽
1987
◽
Vol 51
(17)
◽
pp. 1328-1330
◽
Cited By ~ 2
Author(s):
N. Hayasaka
◽
H. Nakahara
◽
H. Okano
◽
Y. Horiike
Keyword(s):
Contrast Enhancement
◽
Polycrystalline Silicon
◽
Pattern Transfer
◽
Enhancement Pattern
◽
Phosphorus Doped
Download Full-text
Boron- and phosphorus-doped polycrystalline silicon thin films prepared by silver-induced layer exchange
Applied Physics Letters
◽
10.1063/1.4808024
◽
2013
◽
Vol 102
(21)
◽
pp. 212102
◽
Cited By ~ 5
Author(s):
T. Antesberger
◽
T. A. Wassner
◽
C. Jaeger
◽
M. Algasinger
◽
M. Kashani
◽
...
Keyword(s):
Thin Films
◽
Polycrystalline Silicon
◽
Silicon Thin Films
◽
Phosphorus Doped
Download Full-text
Kinetics of the reactions of intrinsic and phosphorus doped polycrystalline silicon with molecular chlorine
Chemical Physics
◽
10.1016/0301-0104(91)80061-l
◽
1991
◽
Vol 153
(3)
◽
pp. 483-489
◽
Cited By ~ 6
Author(s):
Zane H. Walker
◽
Elmer A. Ogryzlo
Keyword(s):
Polycrystalline Silicon
◽
Molecular Chlorine
◽
Phosphorus Doped
◽
Kinetics Of
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Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon
IEEE Journal of Photovoltaics
◽
10.1109/jphotov.2018.2806298
◽
2018
◽
pp. 1-6
◽
Cited By ~ 3
Author(s):
Toni P. Pasanen
◽
Hannu S. Laine
◽
Ville Vahanissi
◽
Kristian Salo
◽
Sebastian Husein
◽
...
Keyword(s):
Optical Properties
◽
Black Silicon
◽
Electrical And Optical Properties
◽
Phosphorus Doped
Download Full-text
Structural and optical properties of polycrystalline silicon thin films deposited by PECVD method
Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996
◽
10.1109/pvsc.1996.564228
◽
1996
◽
Author(s):
Furong Zhu
◽
H. Kohara
◽
T. Fuyuki
◽
H. Matsunami
Keyword(s):
Thin Films
◽
Optical Properties
◽
Polycrystalline Silicon
◽
Structural And Optical Properties
◽
Silicon Thin Films
Download Full-text
Thermal Oxidation of Heavily Phosphorus‐Doped Thin Films of Polycrystalline Silicon
Journal of The Electrochemical Society
◽
10.1149/1.2123503
◽
1982
◽
Vol 129
(10)
◽
pp. 2321-2326
◽
Cited By ~ 27
Author(s):
Krishna C. Saraswat
◽
Harinder Singh
Keyword(s):
Thin Films
◽
Thermal Oxidation
◽
Polycrystalline Silicon
◽
Phosphorus Doped
Download Full-text
Response to “Comment on ‘Phosphorus‐Doped Polycrystalline Silicon via LPCVD’” [J. Electrochem. Soc., 131, 2361]: I . Process Characterization
Journal of The Electrochemical Society
◽
10.1149/1.2165135
◽
1985
◽
Vol 132
(5)
◽
pp. 1258-1258
Author(s):
B. S. Meyerson
Keyword(s):
Polycrystalline Silicon
◽
Process Characterization
◽
Phosphorus Doped
Download Full-text
Low-Resistivity Phosphorus-Doped Polycrystalline Silicon Thin Films Formed by Catalytic Chemical Vapor Deposition and Successive Rapid Thermal Annealing
Japanese Journal of Applied Physics
◽
10.1143/jjap.41.501
◽
2002
◽
Vol 41
(Part 1, No. 2A)
◽
pp. 501-506
◽
Cited By ~ 13
Author(s):
Rui Morimoto
◽
Akira Izumi
◽
Atsushi Masuda
◽
Hideki Matsumura
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Vapor Deposition
◽
Polycrystalline Silicon
◽
Chemical Vapor
◽
Catalytic Chemical Vapor Deposition
◽
Silicon Thin Films
◽
Phosphorus Doped
Download Full-text
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