Plasma-assisted chemical vapour deposition of hard coatings with metallo-organic compounds

1991 ◽  
Vol 139 ◽  
pp. 61-66 ◽  
Author(s):  
K.-T. Rie ◽  
A. Gebauer
2007 ◽  
Vol 336-338 ◽  
pp. 1776-1779
Author(s):  
Chong Mu Lee ◽  
Kyung Ha Kim

Diamond-like carbon (DLC) films have been deposited by radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) with different Ar-CH4 mixtures. Nanocrystalline diamond films have been deposited by microwave plasma-enhanced chemical vapour deposition (MPCVD), using Ar-H2-CH4 mixtures. X-ray photoelectron spectroscopy (XPS) and nanotribological investigation (by scanning force microscopy) have been used to compare the mechanical properties and structures of these films. Highly orientated and non-orientated microcrystalline diamond films and MPCVD-produced amorphous carbon have also been studied by way of comparison. The diamond films exhibit a linear relationship between roughness and the coefficient of friction. The DLC and amorphous carbon have higher friction coefficients than the best performing diamond film, but may more easily be deposited as smooth coating. Possible applications for these various carbon-based films include microelectromechanical components, for which smooth, hard coatings are required.


2001 ◽  
Vol 142-144 ◽  
pp. 1005-1011 ◽  
Author(s):  
C. Mitterer ◽  
F. Holler ◽  
C. Lugmair ◽  
R. Nöbauer ◽  
R. Kullmer ◽  
...  

Author(s):  
Pavel Hudeček ◽  
Petr Dostál

Modern coating methods are having become an important part of industry. Wear resistance, durability, toughness (breakage resistance) and hot hardness (high hardness and chemical stability at high temperature) are the four main technological properties necessary for durability and long life time. These proprieties are for productivity, economy and ecology very important point. This resource deals with the analysis of properties of hard coatings and wear resistance of chemical vapour deposition (PVD) coated technology. It focuses on the preparation, execution and evaluation of test coatings on the front ball-milling cutters. Examination of these characteristic properties may give into an insight to the reason why some systems show excellent wear characteristic.


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