Characterization of boron nitride films prepared by the dual ion beam deposition technique

1990 ◽  
Vol 7 (1-2) ◽  
pp. 107-110 ◽  
Author(s):  
W.L. Lin ◽  
Z. Xia ◽  
Y.L. Liu ◽  
Y.C. Fen
Keyword(s):  
Boron Nitride ◽  
Ion Beam ◽  
Deposition Technique ◽  
Ion Beam Deposition ◽  
Boron Nitride Films ◽  
Beam Deposition

Characterization of cubic boron nitride films grown by mass separated ion beam deposition

1996 ◽  
pp. 153-158
Author(s):  
H. Hofsäss ◽  
C. Ronning ◽  
U. Griesmeier ◽  
M. Gross ◽  
S. Reinke ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Ion Beam Deposition ◽  
Boron Nitride Films ◽  
Beam Deposition

Cubic boron nitride films grown by low energy B+ and N+ ion beam deposition

1995 ◽  
Vol 67 (1) ◽  
pp. 46-48 ◽  
Author(s):  
H. Hofsäss ◽  
C. Ronning ◽  
U. Griesmeier ◽  
M. Gross ◽  
S. Reinke ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Low Energy ◽  
Ion Beam Deposition ◽  
Boron Nitride Films ◽  
Beam Deposition

Stress relaxation and optical characterization of TiO2 and SiO2 films grown by dual ion beam deposition

2008 ◽  
Vol 516 (23) ◽  
pp. 8604-8608 ◽  
Author(s):  
C. Bundesmann ◽  
I.-M. Eichentopf ◽  
S. Mändl ◽  
H. Neumann
Keyword(s):  
Stress Relaxation ◽  
Ion Beam ◽  
Optical Characterization ◽  
Sio2 Films ◽  
Ion Beam Deposition ◽  
Beam Deposition

scholarly journals Growth and Characterization of NbTiN Films Synthesized by Reactive Bias Target Ion Beam Deposition (RBTIBD)

2019 ◽  
Vol 29 (5) ◽  
pp. 1-5 ◽  
Author(s):  
Michael E. Cyberey ◽  
Tannaz Farrahi ◽  
Michael Eller ◽  
Jiwei Lu ◽  
Robert M. Weikle ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Deposition ◽  
Beam Deposition
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