OXYGEN TRANSPORT STUDIED BY 18O LABELLING IN THIN THERMAL SILICON OXIDE FILMS IN CONNECTION WITH THEIR STRUCTURAL CHARACTERISTICS

1983 ◽  
pp. 463-471
Author(s):  
M. FROMENT ◽  
B. AGIUS ◽  
S. RIGO ◽  
F. ROCHET
Keyword(s):  
Oxygen Transport ◽  
Silicon Oxide ◽  
Structural Characteristics ◽  
Oxide Films

The Composition and Properties of PECVD Silicon Oxide Films

1985 ◽  
Vol 132 (8) ◽  
pp. 2012-2019 ◽  
Author(s):  
P. Pan ◽  
L. A. Nesbit ◽  
R. W. Douse ◽  
R. T. Gleason
Keyword(s):  
Silicon Oxide ◽  
Oxide Films

The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

1970 ◽  
Vol 117 (2) ◽  
pp. 272 ◽  
Author(s):  
William A. FitzGibbons ◽  
Thomas Kloffenstein ◽  
Karl M. Busen
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermally Grown

scholarly journals Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties

2018 ◽  
Vol 24 (S1) ◽  
pp. 1810-1811 ◽  
Author(s):  
Krishna Kanth Neelisetty ◽  
Sebastian Gutsch ◽  
Falk von Seggern ◽  
Alan Molinari ◽  
Alexander Vahl ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electrical Properties ◽  
Silicon Oxide ◽  
Oxide Films

Charge storage in evaporated silicon oxide films

1970 ◽  
Vol 6 (1) ◽  
pp. 31-50 ◽  
Author(s):  
R.P. Howson ◽  
A. Taylor
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Charge Storage
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