scholarly journals Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties

2018 ◽  
Vol 24 (S1) ◽  
pp. 1810-1811 ◽  
Author(s):  
Krishna Kanth Neelisetty ◽  
Sebastian Gutsch ◽  
Falk von Seggern ◽  
Alan Molinari ◽  
Alexander Vahl ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electrical Properties ◽  
Silicon Oxide ◽  
Oxide Films

scholarly journals Electron Beam and Ion Beam Irradiation Damage of Silicon Oxide Films during AES and XPS Analysis.

Hyomen Kagaku ◽  
1997 ◽  
Vol 18 (8) ◽  
pp. 473-477 ◽  
Author(s):  
Makoto NAKAMURA ◽  
Satoru KISHIDA ◽  
Mineharu SUZUKI ◽  
Surface Analysis Society of Japan
Keyword(s):  
Electron Beam ◽  
Silicon Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Irradiation Damage ◽  
Xps Analysis ◽  
Beam Irradiation ◽  
Ion Beam Irradiation

Photoluminescence in silicon/silicon oxide films produced by the Pulsed Electron Beam Ablation technique

2012 ◽  
Vol 358 (5) ◽  
pp. 880-884 ◽  
Author(s):  
M. Araya ◽  
D.E. Díaz-Droguett ◽  
M. Ribeiro ◽  
K. F. Albertin ◽  
J. Avila ◽  
...  
Keyword(s):  
Electron Beam ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Pulsed Electron Beam ◽  
Ablation Technique ◽  
Silicon Silicon
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