A thermodynamic model for the growth of buried oxide layers by thermal oxidation

1996 ◽  
pp. 237-240
Author(s):  
E. Schroer ◽  
S. Hopfe ◽  
J.-Y. Huh ◽  
U. Gösele
Keyword(s):  
Thermal Oxidation ◽  
Thermodynamic Model ◽  
Oxide Layers ◽  
Buried Oxide

A thermodynamic model for the growth of buried oxide layers by thermal oxidation

1996 ◽  
Vol 36 (1-3) ◽  
pp. 237-240 ◽  
Author(s):  
E. Schroer ◽  
S. Hopfe ◽  
J.-Y. Huh ◽  
U. Gösele
Keyword(s):  
Thermal Oxidation ◽  
Thermodynamic Model ◽  
Oxide Layers ◽  
Buried Oxide

ChemInform Abstract: Growth of Buried Oxide Layers of Silicon-on-Insulator (SOI) Structures by Thermal Oxidation of the Top Silicon Layer.

ChemInform ◽  
2010 ◽  
Vol 28 (43) ◽  
pp. no-no
Author(s):  
E. SCHROER ◽  
S. HOPFE ◽  
Q. Y. TONG ◽  
U. GOESELE ◽  
W. SKORUPA
Keyword(s):  
Thermal Oxidation ◽  
Silicon Layer ◽  
Silicon On Insulator ◽  
Oxide Layers ◽  
Buried Oxide

Growth of Buried Oxide Layers of Silicon‐on‐Insulator Structures by Thermal Oxidation of the Top Silicon Layer

1997 ◽  
Vol 144 (6) ◽  
pp. 2205-2210 ◽  
Author(s):  
E. Schroer ◽  
S. Hopfe ◽  
Q. Y. Tong ◽  
U. Gösele ◽  
W. Skorupa
Keyword(s):  
Thermal Oxidation ◽  
Silicon Layer ◽  
Silicon On Insulator ◽  
Oxide Layers ◽  
Buried Oxide

Buried Oxide Layers Formed by Oxygen Implantation for Potential Use in Dielectrically Isolated ICs

1981 ◽  
pp. 228-231
Author(s):  
K. V. Anand ◽  
P. Pang ◽  
J. B. Butcher ◽  
K. Das ◽  
E. Franks ◽  
...  
Keyword(s):  
Oxide Layers ◽  
Oxygen Implantation ◽  
Buried Oxide ◽  
Potential Use

More Than a Surface Probe: Investigation of Subsurface Charging in Buried Oxide Layers in Silicon Using Kelvin Probe Microscopy

2004 ◽  
Vol 10 (S02) ◽  
pp. 1090-1091
Author(s):  
Marion A. Stevens-Kalceff
Keyword(s):  
Kelvin Probe ◽  
Oxide Layers ◽  
Probe Microscopy ◽  
Kelvin Probe Microscopy ◽  
Buried Oxide ◽  
Surface Probe ◽  
Probe Investigation

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Buried oxide layers formed by low dose SIMOX processes

1995 ◽  
Vol 28 (1-4) ◽  
pp. 411-414 ◽  
Author(s):  
B. Aspar ◽  
C. Guilhalmenc ◽  
C. Pudda ◽  
A. Garcia ◽  
A.M. Papon ◽  
...  
Keyword(s):  
Low Dose ◽  
Oxide Layers ◽  
Buried Oxide
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