Numerical simulation of the discharge in d.c. magnetron sputtering
1996 ◽
Vol 286
(1-2)
◽
pp. 305-316
◽
2014 ◽
Vol 53
(8)
◽
pp. 088001
◽
Keyword(s):
2021 ◽
Vol 2086
(1)
◽
pp. 012018
2014 ◽
Vol 887-888
◽
pp. 743-748
◽
2009 ◽
Vol 00
(00)
◽
pp. 090904073309027-8
2020 ◽
1996 ◽
Vol 22
◽
pp. 148-149
◽
Keyword(s):