Microwave-assisted volatilization of silicon fluorides for the determination of trace impurities in high purity silicon powder and quartz by ICP-MS

2005 ◽  
Vol 536 (1-2) ◽  
pp. 295-299 ◽  
Author(s):  
Ruey-Lin Ueng ◽  
Shiuh-Jen Jiang ◽  
Chia-Ching Wan ◽  
A.C. Sahayam
2015 ◽  
Vol 30 (4) ◽  
pp. 909-915 ◽  
Author(s):  
Zheng Wang ◽  
Junye Zhang ◽  
Guoxia Zhang ◽  
Deren Qiu ◽  
Pengyuan Yang

A simple, rapid and reliable method was developed for the determination of trace impurities in high-purity silicon nitride (nm- and μm-sized) by ICP-OES using a slurry nebulization technique.


1999 ◽  
Vol 48 (9) ◽  
pp. 835-840 ◽  
Author(s):  
Masamitsu FUKUDA ◽  
Kazutoshi SHIMURA ◽  
Minoru TAKEYA

DENKI-SEIKO ◽  
1988 ◽  
Vol 59 (4) ◽  
pp. 263-270 ◽  
Author(s):  
Fumikichi Mogi ◽  
Kiyotaka Itoh ◽  
Noriko Okamoto ◽  
Masanao Narita ◽  
Michihiko Fujine

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