Carbon nitride thin films prepared by radio-frequency magnetron sputtering combined with a nitrogen radical beam source

2003 ◽  
Vol 94 (11) ◽  
pp. 7345-7350 ◽  
Author(s):  
Wentao Xu ◽  
Li Wang ◽  
Isao Kojima
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Beam Source ◽  
Nitrogen Radical

Effect of CxNyMolecular Species on Carbon Nitride Thin Films Deposited by Radio Frequency Magnetron Sputtering

2008 ◽  
Vol 47 (11) ◽  
pp. 8530-8533 ◽  
Author(s):  
Kimin Roh ◽  
Byung-Keun Na ◽  
Si-Kyoung Choi ◽  
Jung-Hyung Kim ◽  
Dae-Jin Seong ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

2006 ◽  
Vol 252 (12) ◽  
pp. 4185-4189 ◽  
Author(s):  
Lihua Liu ◽  
Yuxin Wang ◽  
Kecheng Feng ◽  
Yingai Li ◽  
Weiqing Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
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