Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties

2021 ◽  
pp. 150138
Author(s):  
Xiang Dong ◽  
Yuanjie Su ◽  
Zhiming Wu ◽  
Xiangdong Xu ◽  
Zihao Xiang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Film Growth ◽  
Pulse Frequency ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Vanadium Oxide Thin Films

Enhanced electrical and noise properties of nanocomposite vanadium oxide thin films by reactive pulsed-dc magnetron sputtering

2012 ◽  
Vol 100 (26) ◽  
pp. 262108 ◽  
Author(s):  
H. A. Basantani ◽  
S. Kozlowski ◽  
Myung-Yoon Lee ◽  
J. Li ◽  
E. C. Dickey ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Vanadium Oxide Thin Films

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering

2003 ◽  
Vol 93 ◽  
pp. 287-294
Author(s):  
P. Reinig ◽  
F. Fenske ◽  
A. Schöpke ◽  
B. Selle ◽  
W. Fuhs ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
Dc Magnetron Sputtering ◽  
Silicon Thin Films ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Nanostructured CrN thin films prepared by reactive pulsed DC magnetron sputtering

2010 ◽  
Vol 167 (1) ◽  
pp. 17-25 ◽  
Author(s):  
T. Elangovan ◽  
P. Kuppusami ◽  
R. Thirumurugesan ◽  
V. Ganesan ◽  
E. Mohandas ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Properties of boron-doped ZnO thin films deposited by pulsed DC magnetron sputtering at different substrate temperatures

2015 ◽  
Vol 121 (3) ◽  
pp. 1147-1153 ◽  
Author(s):  
B. Wen ◽  
C. Q. Liu ◽  
N. Wang ◽  
H. L. Wang ◽  
S. M. Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Boron Doped ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering ◽  
Substrate Temperatures

Titanium oxide thin films synthesis by pulsed – DC magnetron sputtering

Vacuum ◽  
2009 ◽  
Vol 83 ◽  
pp. S91-S94 ◽  
Author(s):  
Jurgita Čyvienė ◽  
Edvinas Navickas ◽  
Darius Milčius ◽  
Giedrius Laukaitis
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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