Vanadium oxides are a class of materials with outstanding physical and chemical
properties. They find a wide field of technological applications such as optical and electrical
switching devices, light detectors, temperature sensors, micro batteries, etc. There are several
studies regarding the production of vanadium oxide films by radio-frequency (RF) magnetron
sputtering, and with increasing interest on the thermochromic VO2 phase. However, literature with
focus on vanadium oxide films deposited by direct current (DC) magnetron sputtering is very
limited. In this work, we have successfully deposited vanadium oxide thin films by reactive DC
magnetron sputtering under several processing conditions. The effect of substrate type, temperature,
and O2/Ar flow ratio on phase formation has been studied. Structural analysis and phase
determination have been carried out by X-ray diffractometry (XRD). Some single phase samples
were also analysed with respect to surface morphology by means of scanning electron microscopy
(SEM) and atomic force microscopy (AFM). The thermochromic behaviour of single phase VO2(M)
films has been evaluated by optical spectrophotometry.
