Hydrogenated amorphous silicon deposited by pulsed DC magnetron sputtering. Deposition temperature effect

2008 ◽  
Vol 517 (1) ◽  
pp. 369-371 ◽  
Author(s):  
A. Ben Abdelmoumen ◽  
R. Cherfi ◽  
M. Kechoune ◽  
M. Aoucher
Keyword(s):  
Magnetron Sputtering ◽  
Temperature Effect ◽  
Amorphous Silicon ◽  
Deposition Temperature ◽  
Hydrogenated Amorphous Silicon ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Hydrogenated Amorphous

Deposition temperature effects on the characteristics of a-Si:H deposited by pulsed DC magnetron sputtering

2009 ◽  
Vol 206 (7) ◽  
pp. 1504-1509 ◽  
Author(s):  
R. Cherfi ◽  
A. Abdelmoumene ◽  
M. Kechouane ◽  
A. Rahal ◽  
M. Aoucher ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Temperature Effects ◽  
Deposition Temperature ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Roll-to-roll pulsed dc magnetron sputtering deposition of WO3 for electrochromic windows

2001 ◽  
Vol 46 (13-14) ◽  
pp. 1931-1936 ◽  
Author(s):  
C. Brigouleix ◽  
P. Topart ◽  
E. Bruneton ◽  
F. Sabary ◽  
G. Nouhaut ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Roll To Roll ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Electrochromic Windows

scholarly journals Large area silicon epitaxy using pulsed DC magnetron sputtering deposition

2008 ◽  
Vol 85 (3) ◽  
pp. 636-639 ◽  
Author(s):  
P. Plantin ◽  
F. Challali ◽  
O. Carriot ◽  
F. Lainat ◽  
M. Ancilotti ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Large Area ◽  
Sputtering Deposition ◽  
Silicon Epitaxy ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

High rate amorphous and crystalline silicon formation by pulsed DC magnetron sputtering deposition for photovoltaics

2014 ◽  
Vol 212 (1) ◽  
pp. 42-46 ◽  
Author(s):  
Louise R. Bailey ◽  
Gary Proudfoot ◽  
Brodie Mackenzie ◽  
Niels Andersen ◽  
Arne Karlsson ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Crystalline Silicon ◽  
High Rate ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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