Design and Modeling of a MEMS Accelerometer Based on Coupled Mode-Localized Nonlinear Resonators Under Electrostatic Actuation
2021 ◽
pp. 105960
2014 ◽
Vol 7
(5)
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pp. 164
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Keyword(s):
2007 ◽
2020 ◽
Vol 73
◽
pp. 37-51
1977 ◽
Vol 67
(6)
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pp. 825
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