Molecular dynamics simulation of the combination effect of the tip inclination and scratching direction on nanomachining of single crystal silicon
2012 ◽
Vol 2012.20
(0)
◽
pp. 5-6
2004 ◽
Vol 471-472
◽
pp. 144-148
◽
2014 ◽
Vol 47
(27)
◽
pp. 275304
◽
2004 ◽
Vol 102
(18)
◽
pp. 1959-1964
◽
2020 ◽
Vol 118
◽
pp. 105168
◽
2019 ◽
Vol 157-158
◽
pp. 254-266
◽
Molecular Dynamics Simulation for Nanohardness Experiments Based on Single Crystal Silicon Substrate
2004 ◽
Vol 259-260
◽
pp. 180-185
◽
2016 ◽
Vol 23
◽
pp. 201-210
◽