Volatile molybdenum containing compounds have successfully been utilized for the atomic layer deposition of MoN<i><sub>x</sub></i>, MoO<sub>3</sub>, MoS<sub>2</sub>, and MoC<i><sub>x</sub></i>N<i><sub>y</sub></i>. Most of the reported volatile molybdenum containing compounds have been prepared via salt metathesis reactions of <i>bis</i>(<i>tert</i>-butylimido)-dichloromolybdenum(VI), with anionic nitrogen based ligands. Herein we describe the preparation of several adducts of [(<i>t</i>-BuN=)<sub>2</sub>MoCl<sub>2</sub>]<sub>2</sub> (<b>2</b>) <i>via</i> ligand exchange reactions with various neutral ligands, including both mono- and bidentate ethers, amines, and phosphines, as well as an <i>N</i>-heterocyclic carbene (NHC). These compounds have been characterized using NMR spectroscopy, elemental analysis, and the solid-state structures have been determined using single crystal X-ray crystallography. The volatility and thermal stability of all compounds have been assessed using TGA and DSC, showing that the coordinated ligands can improve the volatility, but in many cases the gas phase species reverts to <b>2</b>. This highlights a strategy for using coordinative ligands that are easily thermolyzed during evaporation and delivery yet improve the volatility of a key precursor.
Theoretical and experimental investigations of ligand exchange in amidinate and guanidinate ligand systems and the atomic layer deposition of aluminum oxide
