Space- and time-resolved diagnostics of microwave plasma process used for hydrogenated amorphous carbon film coating of PET bottles
2008 ◽
Vol 17
(4-5)
◽
pp. 633-640
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2006 ◽
Vol 15
(4-8)
◽
pp. 921-927
◽
2001 ◽
Vol 184
(2)
◽
pp. R4-R5
◽
2015 ◽
Vol 163
(3)
◽
pp. E54-E61
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