Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD
2008 ◽
Vol 17
(7-10)
◽
pp. 1697-1701
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Keyword(s):
2006 ◽
Vol 15
(4-8)
◽
pp. 913-916
◽
Keyword(s):
2006 ◽
Vol 15
(2-3)
◽
pp. 188-192
◽
Keyword(s):
2005 ◽
Vol 14
(3-7)
◽
pp. 1084-1088
◽
Keyword(s):
2005 ◽
Vol 351
(30-32)
◽
pp. 2562-2567
◽
Keyword(s):
2006 ◽
Vol 376-377
◽
pp. 331-333
◽
Keyword(s):
1986 ◽
Vol 106
(8)
◽
pp. 391-397
Keyword(s):
2013 ◽
Vol 38
(1)
◽
pp. 31-34
◽
Keyword(s):