scholarly journals Investigation on the Enhancement of the Thermoelectric Power Factor of ZnO Thin Films by Al-doping using Asymmetric Bipolar Pulsed-DC Magnetron Sputtering Technology

2014 ◽  
Vol 61 ◽  
pp. 2355-2358 ◽  
Author(s):  
Athorn Vora-ud ◽  
Tosawat Seetawan ◽  
Weerasak Somkhunthot ◽  
Nuwat Pimpabute ◽  
Thanusit Burinprakhon
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Thermoelectric Power ◽  
Power Factor ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Al Doping ◽  
Thermoelectric Power Factor ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Growth of Al-doped ZnO thin films by pulsed DC magnetron sputtering

2005 ◽  
Vol 277 (1-4) ◽  
pp. 352-358 ◽  
Author(s):  
Hyungduk Ko ◽  
Weon-Pil Tai ◽  
Ki-Chul Kim ◽  
Sang-Hyeob Kim ◽  
Su-Jeong Suh ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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