Radio frequency magnetron sputtering deposition of low-resistivity and broad-spectral transmission F and Al co-doped ZnO film with mobility exceeding 50 cm2 V−1 s−1

Optik ◽  
2020 ◽  
Vol 219 ◽  
pp. 165105
Author(s):  
Xudong Meng ◽  
Huarong Zhang ◽  
Xiaobo Zhang ◽  
Guoxi Zheng ◽  
Xicheng Xie ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Spectral Transmission ◽  
Radio Frequency Magnetron Sputtering ◽  
Zno Film ◽  
Sputtering Deposition ◽  
Low Resistivity ◽  
Doped Zno ◽  
Co Doped

Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽  
2019 ◽  
Vol 194 ◽  
pp. 471-477 ◽  
Author(s):  
Yanfeng Wang ◽  
Jianmin Song ◽  
Jie Zhang ◽  
Guoxi Zheng ◽  
Xiaochen Duan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno ◽  
Co Doped

Optical properties of (Mn, Co) co-doped ZnO films prepared by dual-radio frequency magnetron sputtering

2006 ◽  
Vol 515 (4) ◽  
pp. 2361-2365 ◽  
Author(s):  
Zheng-bin Gu ◽  
Ming-hui Lu ◽  
Jing Wang ◽  
Chao-ling Du ◽  
Chang-sheng Yuan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno ◽  
Co Doped

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale
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