Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer
2020 ◽
Vol 92
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pp. 105314
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2015 ◽
Vol 1110
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pp. 211-217
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2010 ◽
Vol 157
(10)
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pp. H909
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2018 ◽
Vol 390
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pp. 270-277
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