Experimental study on seismic vibration control of stockers in wafer and LCD panel fabs
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2017 ◽
Vol 22
(5)
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pp. 2186-2195
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2014 ◽
Vol 25
(6)
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pp. 649-656
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2010 ◽
Vol 3
(2)
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pp. 156-175
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2012 ◽
Vol 246-247
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pp. 169-172
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2014 ◽
Vol 37
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pp. 10-19
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