Insight into the structural evolution during TiN film growth via atomic resolution TEM
2018 ◽
Vol 754
◽
pp. 257-267
◽
Keyword(s):
2015 ◽
Vol 119
(32)
◽
pp. 18046-18055
◽
2016 ◽
Vol 146
◽
pp. 300-321
◽
2019 ◽
Vol 58
(18)
◽
pp. 5967-5972
Keyword(s):