Application of laser induced electron impact ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with SiH4-NH3 gas mixtures
2007 ◽
Vol 18
(11)
◽
pp. 1950-1958
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2008 ◽
Vol 23
(12)
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pp. 1590
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2011 ◽
Vol 115
(37)
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pp. 10290-10298
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2012 ◽
Vol 116
(41)
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pp. 10054-10062
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2009 ◽
Vol 1
(9)
◽
pp. 1919-1926
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2007 ◽
Vol 18
(S1)
◽
pp. 33-36
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