Effect of middle temperature intermediate layer on crystal quality of AlGaN grown on sapphire substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2006.11.011 ◽

2007 ◽

Vol 300 (1) ◽

pp. 190-193 ◽

Author(s):

M. Tsukihara ◽

K. Sumiyoshi ◽

T. Okimoto ◽

K. Kataoka ◽

S. Kawamichi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Intermediate Layer ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystal Quality ◽

Sapphire Substrates ◽

Middle Temperature ◽

Metalorganic Chemical

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Effect of ammonia pretreatment on crystal quality of N-polar GaN grown on SiC by metalorganic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2019.01.049 ◽

2019 ◽

Vol 675 ◽

pp. 148-152

Author(s):

Uiho Choi ◽

Kyeongjae Lee ◽

Jaeyeon Han ◽

Taehoon Jang ◽

Yongjun Nam ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystal Quality ◽

Ammonia Pretreatment ◽

Metalorganic Chemical

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Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2014.10.007 ◽

2015 ◽

Vol 414 ◽

pp. 76-80 ◽

Author(s):

Xiao-Hang Li ◽

Yong O. Wei ◽

Shuo Wang ◽

Hongen Xie ◽

Tsung-Ting Kao ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Temperature Dependence ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystalline Quality ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Heteroepitaxial AlN growth 4on c-plane sapphire substrates by ammonia-free high temperature metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126496 ◽

2022 ◽

pp. 126496

Author(s):

Xu-Qiang Shen ◽

Kazutoshi Kojima

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Improved quality of AlxGa1−x as grown on se-Doped AlxGa1−x as substrate-Layers by metalorganic chemical vapor deposition

Journal of Electronic Materials ◽

10.1007/bf02659904 ◽

1996 ◽

Vol 25 (7) ◽

pp. 1064-1066 ◽

Author(s):

Kun-Jing Lee ◽

Z. C. Huang ◽

J. C. Chen

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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Surface evolution and effect of V/III ratio modulation on etch-pit-density improvement of thin AlN templates on nano-patterned sapphire substrates by metalorganic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2018.06.017 ◽

2018 ◽

Vol 455 ◽

pp. 1123-1130 ◽

Author(s):

Tzu-Yu Wang ◽

Chi-Tsung Tasi ◽

Ku-Yen Lin ◽

Sin-Liang Ou ◽

Ray-Hua Horng ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Etch Pit Density ◽

Surface Evolution ◽

Sapphire Substrates ◽

Etch Pit ◽

Metalorganic Chemical ◽

Patterned Sapphire Substrates

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Epitaxial growth of orientation-controlled KNbO3 crystal films on MgO using KTaxNb1−xO3 intermediate layer by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.1336557 ◽

2001 ◽

Vol 78 (1) ◽

pp. 49-51 ◽

Author(s):

Atsushi Onoe ◽

Ayako Yoshida ◽

Kiyofumi Chikuma

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Intermediate Layer ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystal Films ◽

Metalorganic Chemical

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Crystalline quality and surface morphology of (100) CeO2 thin films grown on sapphire substrates by solid source metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(95)00253-7 ◽

1995 ◽

Vol 156 (3) ◽

pp. 227-234 ◽

Author(s):

Z. Lu ◽

R. Hiskes ◽

S.A. DiCarolis ◽

A. Nel ◽

R.K. Route ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Surface Morphology ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystalline Quality ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Improvement of GaAs crystal quality grown on Si by metalorganic chemical vapor deposition through two‐dimensional‐like nucleation with aninsituH2/AsH3plasma cleaning at 450 °C

Applied Physics Letters ◽

10.1063/1.104514 ◽

1991 ◽

Vol 58 (8) ◽

pp. 862-864

Author(s):

Euijoon Yoon ◽

Rafael Reif

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Crystal Quality ◽

Two Dimensional ◽

Gaas Crystal ◽

Metalorganic Chemical

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Maskless lateral epitaxial over growth of GaN films on in situ etched sapphire substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2005.09.001 ◽

2005 ◽

Vol 285 (4) ◽

pp. 466-472 ◽

Author(s):

Maosheng Hao ◽

Takashi Egawa ◽

Hiroyasu Ishikawa

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Origin of Selective Growth of GaN on Maskless V-Grooved Sapphire Substrates by Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.l982 ◽

2005 ◽

Vol 44 (No. 31) ◽

pp. L982-L984 ◽

Author(s):

Jing Wang ◽

Li Wei Guo ◽

Hai Qiang Jia ◽

Zhi Gang Xing ◽

Yang Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Growth ◽

Sapphire Substrates ◽

Metalorganic Chemical

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