Structural, electrical, and optical properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2007.01.037 ◽

2007 ◽

Vol 304 (1) ◽

pp. 64-68 ◽

Author(s):

Quan-Bao Ma ◽

Zhi-Zhen Ye ◽

Hai-Ping He ◽

Shao-Hua Hu ◽

Jing-Rui Wang ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Dc Reactive Magnetron Sputtering

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Electrical and optical properties of molybdenum-doped ZnO transparent conductive thin films prepared by dc reactive magnetron sputtering

Semiconductor Science and Technology ◽

10.1088/0268-1242/24/12/125012 ◽

2009 ◽

Vol 24 (12) ◽

pp. 125012 ◽

Author(s):

Chenguo Wu ◽

Jie Shen ◽

Jin Ma ◽

Sanpo Wang ◽

Zhuangjian Zhang ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Dc Reactive Magnetron Sputtering ◽

Doped Zno ◽

Conductive Thin Films

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Structural, electrical and optical properties of zinc-iridium oxide thin films deposited by DC reactive magnetron sputtering

physica status solidi (c) ◽

10.1002/pssc.201300653 ◽

2014 ◽

Vol 11 (9-10) ◽

pp. 1493-1496 ◽

Author(s):

Martins Zubkins ◽

Roberts Kalendarev ◽

Jevgenijs Gabrusenoks ◽

Kaspars Vilnis ◽

Andris Azens ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Iridium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Dc Reactive Magnetron Sputtering

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Structural, electrical and optical properties of SnO2-x:F-layers deposited by DC-reactive magnetron-sputtering from a metallic target in Ar–O2/CF4 mixtures

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00247-8 ◽

1998 ◽

Vol 98 (1-3) ◽

pp. 1267-1271 ◽

Author(s):

R. Mientus ◽

K. Ellmer

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Dc Reactive Magnetron Sputtering ◽

Metallic Target

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Structure and optical properties of Cd-substituted ZnO (Zn1−x Cd x O) thin films synthesized by the dc reactive magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8451-y ◽

2014 ◽

Vol 117 (2) ◽

pp. 895-900 ◽

Author(s):

Jinghai Yang ◽

Yonggao Yue ◽

Yingrui Sui ◽

Yan Cao ◽

Maobin Wei ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.193 ◽

2017 ◽

Vol 719 ◽

pp. 429-437 ◽

Author(s):

B.L. Zhu ◽

X. Zhao ◽

W.C. Hu ◽

T.T. Li ◽

J. Wu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Substrate Temperatures

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2011.08.019 ◽

2011 ◽

Vol 509 (41) ◽

pp. 9758-9763 ◽

Author(s):

A.X. Wei ◽

Z.X. Ge ◽

X.H. Zhao ◽

J. Liu ◽

Y. Zhao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Tantalum Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Study of electrical and optical properties of CNx thin films deposited by reactive magnetron sputtering

Microelectronics Reliability ◽

10.1016/j.microrel.2011.03.031 ◽

2011 ◽

Vol 51 (7) ◽

pp. 1207-1212 ◽

Author(s):

E.L. Prociów ◽

T. Chodzinski

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties

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Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering

Materials Letters ◽

10.1016/s0167-577x(02)01106-0 ◽

2003 ◽

Vol 57 (13-14) ◽

pp. 1925-1933 ◽

Author(s):

Arshad Mahmood ◽

Nikifor Rakov ◽

Mufei Xiao

Keyword(s):

Optical Properties ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering ◽

Deposition Conditions

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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.044 ◽

2008 ◽

Vol 202 (11) ◽

pp. 2354-2357 ◽

Author(s):

M. Rubio-Roy ◽

E. Pascual ◽

M.C. Polo ◽

J.L. Andújar ◽

E. Bertran

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

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