Unsteady numerical simulations considering effects of thermal stress and heavy doping on the behavior of intrinsic point defects in large-diameter Si crystal growing by Czochralski method
Keyword(s):
2020 ◽
Vol 531
◽
pp. 125334
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 2016.29
(0)
◽
pp. 047
Keyword(s):
2016 ◽
Vol 2016.29
(0)
◽
pp. 060
2013 ◽
Vol 363
◽
pp. 97-104
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 6
(1)
◽
pp. P78-P99
◽