Numerical investigation of the effects of operating parameters in the vibration assisted nano impact machining of single crystalline silicon by loose abrasive using molecular dynamics simulation

2019 ◽  
Vol 43 ◽  
pp. 12-19 ◽  
Author(s):  
Megan Shockly ◽  
N. Duong ◽  
J. Ma ◽  
S. Lei ◽  
M.P. Jahan ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Numerical Investigation ◽  
Crystalline Silicon ◽  
Dynamics Simulation ◽  
Operating Parameters ◽  
Single Crystalline Silicon ◽  
Single Crystalline

scholarly journals Pressure-induced amorphization in the nanoindentation of single crystalline silicon

RSC Advances ◽  
2017 ◽  
Vol 7 (3) ◽  
pp. 1357-1362 ◽  
Author(s):  
Jing Han ◽  
Song Xu ◽  
Jiapeng Sun ◽  
Liang Fang ◽  
Hua Zhu
Keyword(s):  
Molecular Dynamics ◽  
Phase Transformation ◽  
Mechanical Behavior ◽  
Molecular Dynamics Simulations ◽  
Silicon Surface ◽  
Large Scale ◽  
Crystalline Silicon ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Dynamics Simulations

Large-scale molecular dynamics simulations of nanoindentation on a (100) oriented silicon surface were performed to investigate the mechanical behavior and phase transformation of single crystalline silicon.

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