Synthesis and characterization of hafnium oxide and hafnium aluminate ultra-thin films by a sol–gel spin coating process for microelectronic applications

2007 ◽  
Vol 353 (5-7) ◽  
pp. 663-669 ◽  
Author(s):  
A.R. Phani ◽  
M. Passacantando ◽  
S. Santucci
Keyword(s):  
Thin Films ◽  
Spin Coating ◽  
Hafnium Oxide ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Coating Process ◽  
Spin Coating Process

Elaboration and characterization of nano-crystalline layers of transparent titanium dioxide (Anatase-TiO2) deposited by a sol-gel (spin coating) process

2020 ◽  
Vol 19 ◽  
pp. 100482 ◽  
Author(s):  
Radhia Messemeche ◽  
Hanane Saidi ◽  
Abdallah Attaf ◽  
Youcef Benkhetta ◽  
Saadia Chala ◽  
...  
Keyword(s):  
Titanium Dioxide ◽  
Spin Coating ◽  
Sol Gel ◽  
Anatase Tio2 ◽  
Coating Process ◽  
Spin Coating Process ◽  
Nano Crystalline

Synthesis and characterization of Ca3Co4O9 thin films prepared by sol–gel spin-coating technique on Al2O3(001)

2010 ◽  
Vol 518 (16) ◽  
pp. 4546-4548 ◽  
Author(s):  
R. Moubah ◽  
S. Colis ◽  
C. Leuvrey ◽  
G. Schmerber ◽  
M. Drillon ◽  
...  
Keyword(s):  
Thin Films ◽  
Spin Coating ◽  
Sol Gel ◽  
Spin Coating Technique ◽  
Synthesis And Characterization ◽  
Coating Technique

Synthesis and Characterization of La-Doped Hafnium Oxide Thin Films by Sol–Gel Method

2021 ◽  
Vol 222 (1) ◽  
pp. 102-115
Author(s):  
S. Tongpeng ◽  
K. Makbun ◽  
P. Janphuang ◽  
S. Wannapaiboon ◽  
R. Pattanakul ◽  
...  
Keyword(s):  
Thin Films ◽  
Hafnium Oxide ◽  
Sol Gel ◽  
Synthesis And Characterization ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
La Doped
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