scholarly journals Radio-frequency magnetron co-sputtered Ge-Sb-Te phase change thin films

2021 ◽  
Vol 569 ◽  
pp. 121003
Author(s):  
Marek Bouška ◽  
Virginie Nazabal ◽  
Jan Gutwirth ◽  
Tomáš Halenkovič ◽  
Petr Němec
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Phase Change ◽  
Radio Frequency Magnetron

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

Radio frequency magnetron sputtered CdO thin films for optoelectronic applications

2019 ◽  
Vol 126 ◽  
pp. 1-10 ◽  
Author(s):  
P. Sakthivel ◽  
R. Murugan ◽  
S. Asaithambi ◽  
M. Karuppaiah ◽  
S.Rajendran ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Optoelectronic Applications ◽  
Cdo Thin Films

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
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