Nonlinear modeling of d33-mode piezoelectric actuators using experimental vibration analysis
2019 ◽
Vol 131
◽
pp. 278-299
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2016 ◽
Vol 15
(0)
◽
pp. 1-8
Keyword(s):
Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators
2013 ◽
Vol 18
(3)
◽
pp. 821-832
◽
Keyword(s):