The effect of substrate temperature on the physical properties of tantalum oxide thin films grown by reactive radio-frequency sputtering

Hsyi-En Cheng; Chien-Tang Mao

doi:10.1016/j.materresbull.2003.08.003

The effect of substrate temperature on the physical properties of tantalum oxide thin films grown by reactive radio-frequency sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2003.08.003 ◽

2003 ◽

Vol 38 (14) ◽

pp. 1841-1849 ◽

Cited By ~ 11

Author(s):

Hsyi-En Cheng ◽

Chien-Tang Mao

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Radio Frequency ◽

Physical Properties ◽

Tantalum Oxide ◽

Oxide Thin Films ◽

Radio Frequency Sputtering

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Influence of substrate temperature on electrical and optical properties of p-type semitransparent conductive nickel oxide thin films deposited by radio frequency sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.09.051 ◽

2008 ◽

Vol 254 (8) ◽

pp. 2401-2405 ◽

Cited By ~ 96

Author(s):

Lei Ai ◽

Guojia Fang ◽

Longyan Yuan ◽

Nishuang Liu ◽

Mingjun Wang ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Substrate Temperature ◽

Radio Frequency ◽

Nickel Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Radio Frequency Sputtering ◽

Influence Of Substrate ◽

P Type

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Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering

Materials Sciences and Applications ◽

10.4236/msa.2015.65039 ◽

2015 ◽

Vol 06 (05) ◽

pp. 343-347 ◽

Cited By ~ 3

Author(s):

Kenta Miura ◽

Yuki Arai ◽

Kazusa Kano ◽

Osamu Hanaizumi

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Tantalum Oxide ◽

Oxide Thin Films ◽

Co Doped

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Effect of the substrate temperature on the physical properties of molybdenum tri-oxide thin films obtained through the spray pyrolysis technique

Materials Characterization ◽

10.1016/j.matchar.2012.11.002 ◽

2013 ◽

Vol 75 ◽

pp. 184-193 ◽

Cited By ~ 24

Author(s):

H.M. Martínez ◽

J. Torres ◽

L.D. López Carreño ◽

M.E. Rodríguez-García

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Physical Properties ◽

Spray Pyrolysis ◽

Spray Pyrolysis Technique ◽

Oxide Thin Films

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The effect of substrate temperature on the composition and growth of tantalum oxide thin films deposited by plasma-enhanced chemical vapour deposition

Thin Solid Films ◽

10.1016/0040-6090(91)90400-r ◽

1991 ◽

Vol 206 (1-2) ◽

pp. 102-106 ◽

Cited By ~ 26

Author(s):

Sun-Oo Kim ◽

Jeong Soo Byun ◽

Hyeong Joon Kim

Keyword(s):

Thin Films ◽

Substrate Temperature ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Tantalum Oxide ◽

Chemical Vapour ◽

Oxide Thin Films

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Optical characteristics of transparent samarium oxide thin films deposited by the radio-frequency sputtering technique

Pramana ◽

10.1007/s12043-016-1285-8 ◽

2016 ◽

Vol 87 (5) ◽

Cited By ~ 11

Author(s):

A A ATTA ◽

M M EL-NAHASS ◽

KHALED M ELSABAWY ◽

M M ABD EL-RAHEEM ◽

A M HASSANIEN ◽

...

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Optical Characteristics ◽

Samarium Oxide ◽

Oxide Thin Films ◽

Radio Frequency Sputtering

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Influence of substrate treatment temperatures and bias potential on capacitive manganese–cobalt–zinc oxide thin films deposited by radio frequency sputtering

Electrochimica Acta ◽

10.1016/j.electacta.2011.05.073 ◽

2011 ◽

Vol 56 (19) ◽

pp. 6757-6763 ◽

Cited By ~ 4

Author(s):

Chuen-Chang Lin ◽

Jhang-Hao Jhan

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Radio Frequency ◽

Oxide Thin Films ◽

Bias Potential ◽

Radio Frequency Sputtering ◽

Influence Of Substrate

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Effect of doping and substrate temperature on the structural and optical properties of reactive pulsed laser ablated tin oxide doped tantalum oxide thin films

Vacuum ◽

10.1016/j.vacuum.2009.10.026 ◽

2010 ◽

Vol 84 (10) ◽

pp. 1204-1211 ◽

Cited By ~ 7

Author(s):

Renju R. Krishnan ◽

K.M. Nissamudeen ◽

K.G. Gopchandran ◽

V.P. Mahadevan Pillai ◽

V. Ganesan

Keyword(s):

Thin Films ◽

Optical Properties ◽

Substrate Temperature ◽

Tin Oxide ◽

Tantalum Oxide ◽

Pulsed Laser ◽

Oxide Thin Films ◽

Structural And Optical Properties ◽

Effect Of Doping

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Comparison of different annealing gases effects on the optical emission properties of zinc oxide thin films deposited by radio frequency sputtering

2009 22nd International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2009.5271839 ◽

2009 ◽

Author(s):

Chaoyang Li ◽

Tokiyoshi Matsuda ◽

Yoichiro Nakanishi ◽

Keiji Ichinomiya ◽

Mamoru Furuta ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Radio Frequency ◽

Optical Emission ◽

Oxide Thin Films ◽

Emission Properties ◽

Radio Frequency Sputtering

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Effect of doping concentration and substrate temperature on the physical properties of Indium-doped zinc oxide thin films

2012 9th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) ◽

10.1109/iceee.2012.6421147 ◽

2012 ◽

Cited By ~ 1

Author(s):

R.R. Biswal ◽

A. Maldonado ◽

M. de la L. Olvera

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Substrate Temperature ◽

Physical Properties ◽

Doping Concentration ◽

Oxide Thin Films ◽

Effect Of Doping

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Chemically Sprayed Fluorine-Doped Zinc Oxide Thin Films Deposited from Zn(C5H7O2)2: Effect of the Molarity and Substrate Temperature on the Physical Properties

phys stat sol (a) ◽

10.1002/1521-396x(200206)191:2<499::aid-pssa499>3.0.co;2-i ◽

2002 ◽

Vol 191 (2) ◽

pp. 499-508 ◽

Cited By ~ 4

Author(s):

A. Guill�n-Santiago ◽

M. de la L. Olvera ◽

A. Maldonado ◽

A. Reyes ◽

R. Asomoza

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Substrate Temperature ◽

Physical Properties ◽

Oxide Thin Films

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