Ceramic microhotplates for low power metal oxide gas sensors

2020 ◽  
Vol 30 ◽  
pp. 448-451
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Anastasiya Gorshkova ◽  
Marco Fritsch ◽  
Sindy Mosch ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Low Power ◽  
Gas Sensors ◽  
Metal Oxide Gas Sensors

scholarly journals Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater

ACS Omega ◽  
2021 ◽  
Author(s):  
Yulong Chen ◽  
Mingjie Li ◽  
Wenjun Yan ◽  
Xin Zhuang ◽  
Kar Wei Ng ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Low Power ◽  
Gas Sensors ◽  
Low Cost ◽  
Metal Oxide Gas Sensors

Micromechanical fabrication of robust low-power metal oxide gas sensors

2003 ◽  
Vol 93 (1-3) ◽  
pp. 345-349 ◽  
Author(s):  
Alois Friedberger ◽  
P. Kreisl ◽  
E. Rose ◽  
G. Müller ◽  
G. Kühner ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Low Power ◽  
Gas Sensors ◽  
Metal Oxide Gas Sensors

Ozone detection using low-power-consumption metal–oxide gas sensors

1999 ◽  
Vol 74 (1-3) ◽  
pp. 229-232 ◽  
Author(s):  
Th Becker ◽  
L Tomasi ◽  
Chr Bosch-v.Braunmühl ◽  
G Müller ◽  
G Sberveglieri ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Power Consumption ◽  
Low Power ◽  
Gas Sensors ◽  
Low Power Consumption ◽  
Ozone Detection ◽  
Metal Oxide Gas Sensors

scholarly journals P1SM.7 - Investigation of active heated gas filters on metal oxide gas sensors using a microstructured stacked-die setup

2018 ◽  
Author(s):  
T. Graunke ◽  
S. Raible ◽  
K. R. Tarantik ◽  
K. Schmitt ◽  
J. Wöllenstein
Keyword(s):  
Metal Oxide ◽  
Gas Sensors ◽  
Metal Oxide Gas Sensors

scholarly journals GS1.2 - Nanoheterostructure Metal Oxide Gas Sensors: Opportunities and Challenges

2018 ◽  
Author(s):  
S. A. Akbar ◽  
D. R. Miller ◽  
M. A. Al-Hashem ◽  
P. Karnati ◽  
J. Walker ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Gas Sensors ◽  
Metal Oxide Gas Sensors

Investigating Simultaneous Effects of Flow Rate and Chamber Structure on the Performance of Metal Oxide Gas Sensors

2021 ◽  
pp. 1-1
Author(s):  
Hannaneh Mahdavi ◽  
Saeideh Rahbarpour ◽  
Reza Goldoust ◽  
Seyed-Mohsen Hosseini-Golgoo ◽  
Hamidreza Jamaati
Keyword(s):  
Metal Oxide ◽  
Flow Rate ◽  
Gas Sensors ◽  
Metal Oxide Gas Sensors

scholarly journals SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 701 ◽  
Author(s):  
Verena Leitgeb ◽  
Katrin Fladischer ◽  
Frank Hitzel ◽  
Florentyna Sosada-Ludwikowska ◽  
Johanna Krainer ◽  
...  
Keyword(s):  
Electron Beam ◽  
Metal Oxide ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Semiconductor Nanowires ◽  
Kelvin Probe ◽  
Sensor Applications ◽  
Sensitivity And Selectivity ◽  
Stable Performance ◽  
Metal Oxide Gas Sensors

Integration of metal oxide nanowires in metal oxide gas sensors enables a new generation of gas sensor devices, with increased sensitivity and selectivity. For reproducible and stable performance of next generation sensors, the electric properties of integrated nanowires have to be well understood, since the detection principle of metal oxide gas sensors is based on the change in electrical conductivity during gas exposure. We study two different types of nanowires that show promising properties for gas sensor applications with a Scanning Probe Microscope—Scanning Electron Microscope combination. Electron Beam Induced Current and Kelvin Probe Force Microscopy measurements with a lateral resolution in the nanometer regime are performed. Our work offers new insights into the dependence of the nanowire work function on its composition and size, and into the local interaction between electron beam and semiconductor nanowires.

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