Solid particle erosion of aluminium nitride thin film deposited by radio frequency magnetron sputtering technique on AA6061

2021 ◽  
Author(s):  
Ved Prakash Sharma ◽  
Arun Walia ◽  
Mukesh Kumar ◽  
V.N. Shukla
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Solid Particle ◽  
Aluminium Nitride ◽  
Radio Frequency Magnetron ◽  
Solid Particle Erosion ◽  
Radio Frequency Magnetron Sputtering ◽  
Particle Erosion

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

scholarly journals Emission pattern of an aluminium nitride target for radio frequency magnetron sputtering

2011 ◽  
Vol 274 ◽  
pp. 012116 ◽  
Author(s):  
G Gálvez de la Puente ◽  
S Zitzlsberger ◽  
J A Guerra Torres ◽  
O Erlenbach ◽  
R Weingärtner ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Aluminium Nitride ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Emission Pattern

ZnO thin film synthesis by reactive radio frequency magnetron sputtering

2014 ◽  
Vol 318 ◽  
pp. 2-5 ◽  
Author(s):  
Volkan Şenay ◽  
Suat Pat ◽  
Şadan Korkmaz ◽  
Tuna Aydoğmuş ◽  
Saliha Elmas ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering ◽  
Film Synthesis
Sign in / Sign up

Export Citation Format

Share Document