Multilayer thin-film capacitors fabricated by radio-frequency magnetron sputtering

2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials ◽

10.1109/isaf.2011.6013988 ◽

2011 ◽

Author(s):

Yuji Imamiya ◽

Ryuji Yokokawa ◽

Isaku Kanno ◽

Hidetoshi Kotera

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Multilayer Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Capacitors

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Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.09na01 ◽

2011 ◽

Vol 50 (9S2) ◽

pp. 09NA01 ◽

Author(s):

Yuji Imamiya ◽

Isaku Kanno ◽

Ryuji Yokokawa ◽

Hidetoshi Kotera

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Multilayer Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

Film Capacitor ◽

Thin Film Capacitor

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Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.09na01 ◽

2011 ◽

Vol 50 (9) ◽

pp. 09NA01 ◽

Author(s):

Yuji Imamiya ◽

Isaku Kanno ◽

Ryuji Yokokawa ◽

Hidetoshi Kotera

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Multilayer Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

Film Capacitor ◽

Thin Film Capacitor

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Impedance spectroscopy study of RuO2/SrTiO3 thin film capacitors prepared by radio-frequency magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2006.03.013 ◽

2006 ◽

Vol 130 (1-3) ◽

pp. 237-245 ◽

Author(s):

Y.K. Vayunandana Reddy ◽

D. Mergel ◽

W. Osswald

Keyword(s):

Thin Film ◽

Impedance Spectroscopy ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Spectroscopy Study ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Capacitors ◽

Impedance Spectroscopy Study

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Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Vertically Aligned

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Pressure effect on YBa2Cu3O7 thin film growth in off‐axis radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579482 ◽

1995 ◽

Vol 13 (5) ◽

pp. 2412-2419 ◽

Author(s):

S. C. Wu ◽

W. C. Tsai ◽

C. K. Huang ◽

H. T. Hsu ◽

C. J. Huang ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Film Growth ◽

Pressure Effect ◽

Radio Frequency Magnetron ◽

Thin Film Growth ◽

Radio Frequency Magnetron Sputtering

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Evaluation of lithium cobalt oxide films deposited by radio frequency magnetron sputtering as thin-film battery cathodes

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab2c45 ◽

2019 ◽

Vol 58 (8) ◽

pp. 085501

Author(s):

Der-Jun Jan ◽

Chia-Cheng Lee ◽

Yuh-Jeng Yu ◽

Heng-Wei Chiang

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cobalt Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Lithium Cobalt Oxide ◽

Radio Frequency Magnetron Sputtering ◽

Thin Film Battery ◽

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Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

Solid-State Electronics ◽

10.1016/j.sse.2007.11.010 ◽

2008 ◽

Vol 52 (5) ◽

pp. 813-816 ◽

Author(s):

R. Navamathavan ◽

Chi Kyu Choi ◽

Eun-Jeong Yang ◽

Jae-Hong Lim ◽

Dae-Kue Hwang ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Zno Thin Film ◽

Radio Frequency Magnetron Sputtering

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Characteristics and Time-Dependent Instability of Ga-Doped ZnO Thin Film Transistor Fabricated by Radio Frequency Magnetron Sputtering

Chinese Physics Letters ◽

10.1088/0256-307x/28/12/128502 ◽

2011 ◽

Vol 28 (12) ◽

pp. 128502 ◽

Author(s):

Hai-Qin Huang ◽

Jian Sun ◽

Feng-Juan Liu ◽

Jian-Wei Zhao ◽

Zuo-Fu Hu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistor ◽

Radio Frequency Magnetron ◽

Time Dependent ◽

Zno Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

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ZnO thin film synthesis by reactive radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2013.10.044 ◽

2014 ◽

Vol 318 ◽

pp. 2-5 ◽

Author(s):

Volkan Şenay ◽

Suat Pat ◽

Şadan Korkmaz ◽

Tuna Aydoğmuş ◽

Saliha Elmas ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

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Effect of temperature on NH3 sensing by ZnO: Mg thin film grown by radio frequency magnetron sputtering technique

10.1063/1.5028892 ◽

2018 ◽

Author(s):

E. Vinoth ◽

N. Gopalakrishnan

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Effect Of Temperature ◽

Radio Frequency Magnetron Sputtering

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