Modeling and analysis of a 3-DOF Lorentz-force-driven planar motion stage for nanopositioning

Mechatronics ◽  
2010 ◽  
Vol 20 (5) ◽  
pp. 553-565 ◽  
Author(s):  
Jin Lei ◽  
Xin Luo ◽  
Xuedong Chen ◽  
Tianhong Yan
Keyword(s):  
Lorentz Force ◽  
Planar Motion ◽  
Modeling And Analysis ◽  
Motion Stage ◽  
Planar Motion Stage

Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage

2014 ◽  
Vol 22 (11) ◽  
pp. 3067-3073
Author(s):  
佃松宜 DIAN Song-yi ◽  
向国菲 XIANG Guo-fei ◽  
蒲明 PU Ming
Keyword(s):  
Sliding Mode ◽  
Sensorless Control ◽  
Sliding Mode Observer ◽  
Planar Motion ◽  
Motion Stage ◽  
Planar Motion Stage

Planar motion stage control using PDFF controller

2011 ◽  
Author(s):  
Jia-Yush Yen ◽  
Fu-Tsun Kuo ◽  
Ming-Chan Lee ◽  
Ming-Han Chang
Keyword(s):  
Planar Motion ◽  
Motion Stage ◽  
Planar Motion Stage

A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning

2004 ◽  
Vol 28 (3) ◽  
pp. 329-337 ◽  
Author(s):  
Wei Gao ◽  
Shuichi Dejima ◽  
Hiroaki Yanai ◽  
Kei Katakura ◽  
Satoshi Kiyono ◽  
...  
Keyword(s):  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Planar Motion Stage

Improvement in a Surface Motor-Driven Planar Motion Stage

2006 ◽  
Vol 18 (6) ◽  
pp. 808-815 ◽  
Author(s):  
Wei Gao ◽  
◽  
Katsutoshi Horie ◽  
Songyi Dian ◽  
Kei Katakura ◽  
...  
Keyword(s):  
Measurement Errors ◽  
Planar Motion ◽  
Two Dimensional ◽  
Positioning Accuracy ◽  
Accuracy Measurement ◽  
Linear Motors ◽  
Stator Windings ◽  
Motion Stage ◽  
Planar Motion Stage ◽  
Sinusoidal Surface

We report a surface motor-driven planar motion stage with an XYθZsurface encoder. The surface motor consists of two pairs of linear motors. Magnetic arrays are installed on the platen and stator windings of linear motors on the stage base. The platen is moved in the X and Y directions by X and Y linear motors. It is rotated around the Z axis by moment generated by the X or Y linear motors. The surface encoder consists of two two-dimensional (2D) angle sensors and an angle grid with 2D sinusoidal surface waves. The angle grid is installed on the platen. Sensors onside make the stage compact. The surface encoder is improved for higher positioning accuracy. Measurement errors of the surface encoder using two detectors – a quadrant PD and 2D PSD – are determined by simulation. The surface motor for increasing stage speed is modified. We conducted experiments comparing the previous prototype stage (Prototype I) and the improved stage (Prototype II).

A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning

2011 ◽  
Vol 189-193 ◽  
pp. 4121-4125 ◽  
Author(s):  
Song Yi Dian ◽  
Hang Dong ◽  
Wei Gao
Keyword(s):  
Sensorless Control ◽  
Low Cost ◽  
Planar Motion ◽  
Precision Positioning ◽  
Suggested Strategy ◽  
Motion Stage ◽  
Planar Motion Stage

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

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