Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage

2014 ◽  
Vol 22 (11) ◽  
pp. 3067-3073
Author(s):  
佃松宜 DIAN Song-yi ◽  
向国菲 XIANG Guo-fei ◽  
蒲明 PU Ming
2014 ◽  
Vol 609-610 ◽  
pp. 1201-1206
Author(s):  
Song Yi Dian ◽  
Guo Fei Xiang

In this paper, a novel partial sensorless control (PSC) has been tailored to multi-DOF precision positioning issue for Sawyer motor-based planar motion stage. For the position estimation, a Sliding Mode Observer based technique has been implemented. We investigate the positioning performance on open-loop, closed-loop and PSC by experiments. The results of experiments have verified that PSC is an available way to maintain travel range and reduce the cost for precise position sensing while without so much sacrifice on positioning accuracy comparing with closed-loop control in all-axis for the stage.


2011 ◽  
Vol 189-193 ◽  
pp. 4121-4125 ◽  
Author(s):  
Song Yi Dian ◽  
Hang Dong ◽  
Wei Gao

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.


Mechatronics ◽  
2010 ◽  
Vol 20 (5) ◽  
pp. 553-565 ◽  
Author(s):  
Jin Lei ◽  
Xin Luo ◽  
Xuedong Chen ◽  
Tianhong Yan

2021 ◽  
Vol 2030 (1) ◽  
pp. 012004
Author(s):  
Chengwei Xie ◽  
Jingbo Wu ◽  
Zhijun Guo ◽  
Yongwei Wang ◽  
Junjie Liu

2014 ◽  
Vol 556-562 ◽  
pp. 2270-2273
Author(s):  
Hua Cai Lu ◽  
Juan Ti ◽  
Yi Ming Yuan ◽  
Li Sheng Wei

In this paper, a new sensorless control method is proposed for a permanent magnet linear synchronous motor based on Fuzzy sliding mode observer, which combines the advantages of sliding mode observer and Fuzzy controller respectively. The difference between the current estimated value and the actual current value is regarded as sliding mode function; sliding mode function (current error) and variation of the error are used as the input of fuzzy controller, and the width of the boundary layer as the output, adjusting the width of the boundary layer dynamically in real time. The simulation results show that Fuzzy sliding mode observer is able to find a balance between soft chattering and steady-state error, keep the system robustness and control precision.


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