Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage
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2009 ◽
Vol 46
(9-12)
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pp. 899-912
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2014 ◽
Vol 609-610
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pp. 1201-1206
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2017 ◽
Vol 2017
(7)
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pp. 376-384
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2021 ◽
Vol 2030
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pp. 012004
2014 ◽
Vol 556-562
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pp. 2270-2273
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