New selector based on zinc oxide grown by low temperature atomic layer deposition for vertically stacked non-volatile memory devices

2008 ◽  
Vol 85 (12) ◽  
pp. 2442-2444 ◽  
Author(s):  
N. Huby ◽  
G. Tallarida ◽  
M. Kutrzeba ◽  
S. Ferrari ◽  
E. Guziewicz ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Memory Devices ◽  
Layer Deposition ◽  
Non Volatile Memory ◽  
Volatile Memory

scholarly journals RBS/Channeling Analysis of Zinc Oxide Films Grown at Low Temperature by Atomic Layer Deposition

2013 ◽  
Vol 123 (5) ◽  
pp. 899-903 ◽  
Author(s):  
R. Ratajczak ◽  
A. Stonert ◽  
E. Guziewicz ◽  
S. Gierałtowska ◽  
T.A. Krajewski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Oxide Films ◽  
Atomic Layer ◽  
Zinc Oxide Films ◽  
Layer Deposition

TiO2Nanocrystal Prepared by Atomic-Layer-Deposition System for Non-Volatile Memory Application

2007 ◽  
Vol 46 (4B) ◽  
pp. 2523-2526 ◽  
Author(s):  
Cha-Hsin Lin ◽  
Ching-Chiun Wang ◽  
Pei-Jer Tzeng ◽  
Siddheswar Maikap ◽  
Heng-Yuan Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Non Volatile Memory ◽  
Volatile Memory

Low-Temperature-Processed Zinc Oxide Thin-Film Transistors Fabricated by Plasma-Assisted Atomic Layer Deposition

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BF04 ◽  
Author(s):  
Yumi Kawamura ◽  
Mai Tani ◽  
Nozomu Hattori ◽  
Naomasa Miyatake ◽  
Masahiro Horita ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Layer Deposition

Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition

2008 ◽  
Vol 92 (2) ◽  
pp. 023502 ◽  
Author(s):  
N. Huby ◽  
S. Ferrari ◽  
E. Guziewicz ◽  
M. Godlewski ◽  
V. Osinniy
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Electrical Behavior ◽  
Oxide Layers ◽  
Layer Deposition
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