scholarly journals Characterization of ion/electron beam induced deposition of electrical contacts at the sub-μm scale

2011 ◽  
Vol 88 (7) ◽  
pp. 1569-1572 ◽  
Author(s):  
D. Brunel ◽  
D. Troadec ◽  
D. Hourlier ◽  
D. Deresmes ◽  
M. Zdrojek ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electrical Contacts ◽  
Electron Beam Induced Deposition

scholarly journals Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Nanoscale ◽  
2017 ◽  
Vol 9 (42) ◽  
pp. 16349-16356 ◽  
Author(s):  
Brett B. Lewis ◽  
Brittnee A. Mound ◽  
Bernadeta Srijanto ◽  
Jason D. Fowlkes ◽  
George M. Pharr ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Electron Beam Induced Deposition ◽  
Scanning Electron

Nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.

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