Fabricating bi-layered metallic wire-grid polarizers by nanoimprint and O2 plasma etching

2013 ◽  
Vol 102 ◽  
pp. 53-59 ◽  
Author(s):  
Chia-Meng Chen ◽  
Pei-Lun Niu ◽  
Cheng-Kuo Sung ◽  
Cheng-Huan Chen
Keyword(s):  
Plasma Etching ◽  
Metallic Wire ◽  
Wire Grid ◽  
O2 Plasma

Photoluminescence characterization of SF6–O2 plasma etching of silicon

1996 ◽  
pp. 100-103
Author(s):  
I.A. Buyanova ◽  
A. Henry ◽  
B. Monemar ◽  
J.L. Lindström ◽  
G.S. Oehrlein
Keyword(s):  
Plasma Etching ◽  
O2 Plasma

scholarly journals Analysis on Self-Organized Formation of Nanofibers on Diamond-Like Carbon Film Surface during RF O2 Plasma Etching

2013 ◽  
Vol 38 (3) ◽  
pp. 447-450 ◽  
Author(s):  
Toru Harigai ◽  
Koyo Iwasa ◽  
Hirofumi Koji ◽  
Noriko Nitta ◽  
Hiroshi Furuta ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Carbon Film ◽  
Film Surface ◽  
Diamond Like Carbon ◽  
Self Organized ◽  
Diamond Like Carbon Film ◽  
O2 Plasma

Etch-pit formation mechanism induced on HPHT and CVD diamond single crystals by H2 /O2 plasma etching treatment

2012 ◽  
Vol 209 (9) ◽  
pp. 1715-1720 ◽  
Author(s):  
M. Naamoun ◽  
A. Tallaire ◽  
F. Silva ◽  
J. Achard ◽  
P. Doppelt ◽  
...  
Keyword(s):  
Single Crystals ◽  
Formation Mechanism ◽  
Plasma Etching ◽  
Cvd Diamond ◽  
Etch Pit ◽  
Pit Formation ◽  
Diamond Single Crystals ◽  
O2 Plasma

Improved Reflectance for Textured Mc-Silicon Solar Cells by SF6/O2 Plasma Etching

2011 ◽  
Vol 128 (1) ◽  
pp. 59-63 ◽  
Author(s):  
Tao Li ◽  
Chunlan Zhou ◽  
Lei Zhao ◽  
Wenjing Wang ◽  
Hailing Li ◽  
...  
Keyword(s):  
Solar Cells ◽  
Plasma Etching ◽  
Silicon Solar Cells ◽  
O2 Plasma

Deposition of silicon oxychloride films on chamber walls during Cl2/O2 plasma etching of Si

2002 ◽  
Vol 20 (2) ◽  
pp. 499-506 ◽  
Author(s):  
Saurabh J. Ullal ◽  
Harmeet Singh ◽  
Vahid Vahedi ◽  
Eray S. Aydil
Keyword(s):  
Plasma Etching ◽  
O2 Plasma
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