Electron beam-induced crystallization of Al2O3 gate layer on β-Ga2O3 MOS capacitors

Micron ◽  
2021 ◽  
Vol 140 ◽  
pp. 102954
Author(s):  
Christopher J. Klingshirn ◽  
Asanka Jayawardena ◽  
Sarit Dhar ◽  
Rahul P. Ramamurthy ◽  
Dallas Morisette ◽  
...  
Keyword(s):  
Electron Beam ◽  
Mos Capacitors ◽  
Induced Crystallization ◽  
Gate Layer

Electron Irradiation Induced Crystallization of Amorphous Al2O3 Films on Silicon Substrates

1993 ◽  
Vol 311 ◽  
Author(s):  
J. Liu ◽  
C. J. Barbero ◽  
J. W. Corbett ◽  
K. Rajan ◽  
H. Leary
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Silicon Substrates ◽  
Dose Rates ◽  
Transmission Electron ◽  
Beam Dose ◽  
Al2o3 Films ◽  
Induced Crystallization ◽  
Amorphous Al2o3

ABSTRACTAn in situ study of electron beam irradiation induced amorphous–to–crystalline transformation of Al2O3 films on silicon substrates has been carried out using transmission electron microscopy. Trigonal α–Al2O3 crystallites can be observed for electron beam dose rates larger than 10 mA/cm2. It is found that the nucleation and growth processes dominate near the Al2O3–Si interface. The possible effect of the silicon substrate on the growth of Al2O3 crystallites is considered.

Electron‐beam‐induced crystallization of isolated amorphous regions in Si, Ge, GaP, and GaAs

1995 ◽  
Vol 78 (2) ◽  
pp. 974-982 ◽  
Author(s):  
I. Jenc̆ic̆ ◽  
M. W. Bench ◽  
I. M. Robertson ◽  
M. A. Kirk
Keyword(s):  
Electron Beam ◽  
Induced Crystallization

Electron-beam-irradiation-induced crystallization of amorphous solid phase change materials

2018 ◽  
Vol 57 (4) ◽  
pp. 041401 ◽  
Author(s):  
Dong Zhou ◽  
Liangcai Wu ◽  
Lin Wen ◽  
Liya Ma ◽  
Xingyao Zhang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Phase Change ◽  
Electron Beam Irradiation ◽  
Phase Change Materials ◽  
Solid Phase ◽  
Amorphous Solid ◽  
Beam Irradiation ◽  
Induced Crystallization

Electron-beam-induced crystallization of anodic barrier films on aluminium: influence of incorporated anions

1985 ◽  
Vol 15 (5) ◽  
pp. 781-783 ◽  
Author(s):  
K. Shimizu ◽  
K. Kobayashi ◽  
G. E. Thompson ◽  
G. C. Wood
Keyword(s):  
Electron Beam ◽  
Barrier Films ◽  
Induced Crystallization

Magnetic anisotropy of semiconductor (Ge,Mn)Te microstructures produced by laser and electron beam induced crystallization

2011 ◽  
Vol 248 (7) ◽  
pp. 1605-1608 ◽  
Author(s):  
Wojciech Knoff ◽  
Krzysztof Świątek ◽  
Tomasz Andrearczyk ◽  
Viktor Domukhovski ◽  
Piotr Dziawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Magnetic Anisotropy ◽  
Induced Crystallization

ELECTRON BEAM DETECTION OF CHARGE STORAGE IN MOS CAPACITORS

1970 ◽  
Vol 16 (4) ◽  
pp. 147-149 ◽  
Author(s):  
E. E. Huber ◽  
M. S. Cohen ◽  
D. O. Smith
Keyword(s):  
Electron Beam ◽  
Charge Storage ◽  
Mos Capacitors
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