Structural and optical properties of silicon quantum dots in silicon nitride grown in situ by PECVD using different gas precursors
2009 ◽
Vol 159-160
◽
pp. 74-76
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Keyword(s):
2009 ◽
Vol 159-160
◽
pp. 77-79
◽
2006 ◽
Vol 32
(1-2)
◽
pp. 115-118
◽
Keyword(s):